Thermal barrier coating system and method of manufacturing the same

ABSTRACT

A thermal barrier coating system comprising a metal substrate, a metal bonding layer and a ceramics thermal barrier layer wherein the ceramics thermal barrier layer has a columnar structure of a stabilized zirconia containing a stabilizer or a stabilized ZrO 2 —HfO 2  solid solution containing a stabilizer, and comprises 0.1 to 10 mol % of lanthanum oxide.

CROSS REFERENCE TO RELATED APPLICATIONS

The present application is a divisional of U.S. patent application Ser.No. 10/779,309, filed Feb. 13, 2004, which claims priority of JapaneseApplication No. 2003-038867, filed Feb. 17, 2003 and JapaneseApplication No. 2004-029407, filed Feb. 5, 2004, the entire contents ofwhich is hereby incorporated by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a low thermally conductive thermalbarrier coating system and to a method of manufacturing the same and,more particularly, relates to a low thermally conductive thermal barriercoating system which can effectively reduce the temperature of a metalsubstrate because its ceramics thermal barrier layer has low thermalconductivity, and which can exhibit excellent heat resistance andexcellent durability for a long period when applied to high-temperaturecomponents such as gas turbine parts and jet engine parts, and relatesto a method of manufacturing the same.

2. Description of the Related Art

In view of prevention of global warming caused by carbon dioxide gasemitted during combustion of a fossil fuels and improvement in economicefficiency by means of resource saving, further improvement in thermalefficiency is required for prime movers such as gas turbines and jetengines, and thus intensive research has been performed. In gas turbinepower generating installations, it has been known that generatingefficiency is further improved by the burner outlet gas temperaturebeing raised by increasing the operating temperature. To enableoperation at high temperature, metallic materials having high heatresistance has been continuously researched.

To improve durability (reliability) of the heat resisting metallicmaterial, research has been conducted to improve heat resistance of themetallic material itself. For example, heat resistance superalloys madeof a Ni-based alloy, a Co-based alloy, a Fe-based alloy or the like haveintensively been studied as a structural material for high-temperatureparts and various heat resistant superalloys have been put into praticaluse.

However, high-temperature components made only of a superalloy of theprior art do not have sufficiently high melting point and are likely tocause softening and decrease in strength due to recrystallization in ahigh-temperature range, thus causing such fatal restriction that themembers cannot be used at a high-temperature of 1000° C. or more.

As a remedy for the restriction, a thermal barrier coating (TBC: ThermalBarrier Coating) technique has been developed and put into practical usein part. The thermal barrier coating technique has a function ofpreventing temperature rise of a metal substrate by forming an oxidetype ceramic layer having low thermal conductivity on the surface of themetal substrate to block heat.

FIG. 2 is a sectional view showing an example of configuration of a heatresisting structural member formed with the thermal barrier coating(TBC) of the prior art. The thermal barrier coating system shown in FIG.2 has a three-layered structure composed generally of a metal substrate1 made of a superalloy containing Ni, Co or Fe as a main component, ametal bonding layer 2 made of an MCrAlY (wherein that M is at least onekind of Ni, Co, Fe) alloy, platinum aluminide or the like havingexcellent corrosion resistance and excellent oxidation resistance formedon one surface of the metal substrate 1, and a ceramics thermal barrierlayer (thermal barrier coating layer) 3 containing ceramics such as Y₂O₃stabilized ZrO₂ as a main component. Ceramics layers are generallyprovided by a plasma spraying method.

Consequently, an operation and effect of suppressing temperature rise ofthe metal substrate 1 by a thermal barrier effect of the ceramicsthermal barrier layer 3 can be obtained. The metal bonding layer 2 alsoexerts an effect of reducing thermal stress generated between the metalsubstrate 1 and the ceramics thermal barrier layer 3, preventingcorrosion of the metal substrate 1 and suppressing oxidation.

However, the high-temperature component (heat resisting structuralmember) formed with a thermal barrier coating layer of the prior art hadproblems in that it was likely to cause cracking and spalling of theceramics thermal barrier layer and was inferior in durability andreliability. It is considered that cracking and spalling of the ceramicsthermal barrier layer are caused by differences in thermal expansioncoefficient between the ceramic thermal barrier layer and the metalbonding layer, sintering and transformation of the ceramics thermalbarrier layer, and volume expansion due to oxidation of the metalbonding layer.

Once cracking and spalling occur in the ceramics thermal barrier layer,thermal barrier properties drastically deteriorate, causing rapidtemperature rise of the metal substrate. In the worst case, the metalsubstrate may be melted or broken. Such a risk should be avoided foroperation of the equipment.

As a new method of forming a ceramics thermal barrier layer to bereplaced by the plasma spraying method of the prior art, an electronbeam physical vapor deposition (EB-PVD) method has attracted specialinterest recently. Since the ceramics thermal barrier layer synthesizedby the EB-PVD method has a columnar structure including manylongitudinal cracks and thermal stress can be reduced by deformation ofthe longitudinal crack portion, thermal shock resistance is noticeablyimproved.

However, the ceramics thermal barrier layer synthesized by the EB-PVDmethod had a problem in that it is inferior in thermal barrier effect tothe conventional ceramics thermal barrier layer synthesized by theplasma spraying method because of its high thermal conductivity. In thecase of the low thermal barrier effect, the temperature of the metalsubstrate increases and oxidation is accelerated, and thus spalling ofthe coating film is likely to occur. It is, therefore, considered thatthe EB-PVD film having low thermal conductivity leads to an improvementin properties of the thermal barrier coating.

As a finding with respect to providing the ceramics thermal barrierlayer with low thermal conductivity, it is employed to provide aplurality of layers in the columnar structure (see, for example, PatentDocument 1: Japanese Patent Application, First Publication No. Hei11-256304 (page 1, FIGS. 1 to 6)). It is also reported to form a zig-zagpattern by controlling orientation of a columnar structure (see, forexample, Patent Document 2: U.S. Pat. No. 6,455,173(B1) (page 1, FIGS. 2to 3)). There is also a technical report that a low thermally conductivesubstance such as Gd₂Zr₂O₇ to be replaced by the partially stabilizedZrO₂ of the prior art is used as a constituent material of the ceramicsthermal barrier layer (see, for example, Patent Document 3: U.S. Pat.No. 6,258,467 (page 1, FIG. 2)).

However, the use of a special deposition apparatus and a specialtechnique i's indispensable to control the texture of the ceramicsthermal barrier layer so as to provide plural layers in the columnarstructure, as disclosed in Patent Document 1, or to form a zig-zagpattern by controlling orientation of the columnar structure, asdisclosed in Patent Document 2, and also there was drawbacks such ashigh equipment cost, high manufacturing cost and high operating cost ofthe equipment. Therefore, the above techniques are not suited forpractical use. Even if low thermal conductivity is achieved by thetechnique, sintering occurs at high temperature and nanopores or gaps,which are effective to achieve low thermal conductivity, disappear,resulting in high thermal conductivity.

As disclosed in Patent Document 3, when the low thermally conductivesubstance such as Gd₂Zr₂O₇ to be replaced by the stabilized ZrO₂ of theprior art is used as the constituent material of the ceramics thermalbarrier layer, the low thermally conductive substance is inferior inmechanical properties such as erosion resistance and effective means forovercoming the problem and achieving low thermal conductivity has neverbeen established. In the case in which the thermal barrier coatingsystem is applied to high-temperature components such as gas turbineparts and jet engine parts, when spalling of the ceramics thermalbarrier layer occurs, thermal barrier properties drasticallydeteriorate, causing rapid temperature rise of the metal substrate, andthus the member is melted or broken, resulting in a serious obstacleduring operation of the equipment.

In actual gas turbine parts, for example, turbine blade, cooling gasholes having a size of about φ1 mm is provided on the surface of a bladeand a cooling gas is ejected from the inside of the blade, therebysuppressing the temperature from rising. In the case in which a thermalbarrier layer is formed by thermal spraying, since the cooling holes arecovered with the thermal spraying material, it is necessary to dofurther steps such as forming the cooling holes again after coating. Inthe case in which an EB-PVD process is applied to a conventionalmaterial to form a thermal barrier layer, although the cooling holes arenot completely covered, the coating material is deposited around theopening portion, thereby causing problems in that the amount of thecooling gas decreases and satisfactory cooling properties cannot beobtained.

SUMMARY OF THE INVENTION

The present invention has been made to solve the above problems of theprior art and an object thereof is to provide a thermal barrier coatingsystem which improves thermal barrier properties and suppressesdeterioration due to sintering by imparting low thermal conductivity toa ceramics thermal barrier layer synthesized by an EB-PVD method, andwhich can exhibit excellent heat resistance and excellent durability fora long period when applied to high-temperature components such as gasturbine parts and jet engine parts, and a method of manufacturing thesame.

A first aspect of the present invention is a thermal barrier coatingsystem comprising a metal substrate, a metal bonding layer, and aceramics thermal barrier layer formed on the surface of the metalsubstrate via the metal bonding layer by an electron beam physical vapordeposition method, wherein the ceramics thermal barrier layer has acolumnar structure of a stabilized zirconia containing a stabilizer, andalso contains 0.1 to 10 mol % of lanthanum oxide.

A second aspect of the present invention is a thermal barrier coatingsystem comprising a metal substrate, a metal bonding layer, and aceramics thermal barrier layer formed on the surface of the metalsubstrate via the metal bonding layer by an electron beam physical vapordeposition method, wherein the ceramics thermal barrier layer has acolumnar structure of stabilized zirconia-hafnia solid solutioncontaining a stabilizer, and also contains 0.1 to 10 mol % of lanthanumoxide.

A third aspect of the present invention is a method of manufacturing athermal barrier coating system comprising a metal substrate, a metalbonding layer, and a ceramics thermal barrier layer formed integrally onthe surface of the metal substrate via the metal bonding layer, whichcomprises forming the metal bonding layer on the surface of the metalsubstrate, simultaneously melting two kinds of raw materials which are astabilized ZrO₂ deposition material and a La-based composite oxidedeposition material by an electron beam physical vapor depositionmethod, and depositing the resulting mixed vapor on the surface of themetal bonding layer to form the ceramics thermal barrier layer.

A fourth aspect of the present invention is a method of manufacturing athermal barrier coating system comprising a metal substrate, a metalbonding layer, and a ceramics thermal barrier layer formed integrally onthe surface of the metal substrate via the metal bonding layer, whichcomprises forming the metal bonding layer on the surface of the metalsubstrate, simultaneously melting two kinds of raw materials which are astabilized ZrO₂—HfO₂ and a La-based composite oxide deposition materialby an electron beam physical vapor deposition method, and depositing theresulting mixed vapor on the surface of the metal bonding layer to formthe ceramics thermal barrier layer.

A fifth aspect of the present invention is a method of manufacturing athermal barrier coating system comprising a metal substrate, a metalbonding layer, and a ceramics thermal barrier layer formed integrally onthe surface of the metal substrate via the metal bonding layer, whichcomprises forming the metal bonding layer on the surface of the metalsubstrate, melting a composite oxide deposition material, which isobtained by adding La₂O₃ to a stabilized ZrO₂, by an electron beamphysical vapor deposition method, and depositing the resulting rawmaterial vapor on the surface of the metal bonding layer to form theceramics thermal barrier layer.

A sixth aspect of the present invention is a method of manufacturing athermal barrier coating system comprising a metal substrate, a metalbonding layer, and a ceramics thermal barrier layer formed integrally onthe surface of the metal substrate via the metal bonding layer, whichcomprises forming the metal bonding layer on the surface of the metalsubstrate, melting a composite oxide deposition material, which isobtained by adding La₂O₃ to stabilized ZrO₂—HfO₂, by an electron beamphysical vapor deposition method, and depositing the resulting rawmaterial vapor on the surface of the metal bonding layer to form theceramics thermal barrier layer.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

To achieve the aforementioned object, the present inventors havefabricated thermal barrier coating systems by forming ceramics thermalbarrier layers having various compositions and structures, andresearched the influence of the composition and structure of variousceramics thermal barrier layers on thermal conductivity by comparing theresults. As a result, they have found that, in the case in which theceramics thermal barrier layer contains 0.1 to 20 mol % of lanthanum(La), preferably 0.1 to 10 mol % of lanthanum oxide (La₂O₃), low thermalconductivity is effectively imparted to the ceramics thermal barrierlayer, thereby obtaining a thermal barrier coating system havingexcellent heat resistance and excellent durability. The presentinvention has been completed based on the above finding.

In one aspect, the thermal barrier coating system of the presentinvention comprises a metal substrate, a metal bonding layer, and aceramics thermal barrier layer formed on the surface of the metalsubstrate via the metal bonding layer by an electron beam physical vapordeposition (EB-PVD) method, wherein the ceramics thermal barrier layerhas a columnar structure of a stabilized zirconia (ZrO₂) containing astabilizer, and also contains 0.1 to 20 mol % of lanthanum (La),preferably 0.1 to 10 mol % of lanthanum oxide (La₂O₃).

Lanthanum oxide (La₂O₃) is a component, which is incorporated tosuppress sintering of the ceramics thermal barrier layer and to reducethermal conductivity, and is incorporated in an amount of 0.1 to 10 mol%. When the content is less than 0.1 mol %, less effect of reducing thethermal conductivity is exerted. Even if lanthanum oxide is added inexcess amount of more than 10 mol %, the effect of reducing the thermalconductivity is saturated and a large amount of a pyrochlore phase(La₂Zr₂O₇) having poor thermal shock resistance tends to be oftenproduced.

In another aspect, the thermal barrier coating system of the presentinvention comprises a metal substrate, a metal bonding layer, and aceramics thermal barrier layer formed on the surface of the metalsubstrate via the metal bonding layer by an electron beam physical vapordeposition (EB-PVD) method, wherein the ceramics thermal barrier layerhas a columnar structure of stabilized zirconia-hafnia (ZrO₂—HfO₂) solidsolution containing a stabilizer, and also contain 0.1 to 10 mol % oflanthanum oxide (La₂O₃).

HfO₂ and ZrO₂ form a complete solid solution. Since HfO₂ has highmelting point, the heat resistance is more improved as the contentincreases. Higher content decreases a thermal expansion coefficient ofthe ceramics thermal barrier layer, thereby deteriorating the thermalshock resistance. Preferable ratio Hf/Zr is 0.5 or less.

The stabilizer contained in the ceramics thermal barrier layer ispreferably any one selected from the group consisting of yttrium oxide(Y₂O₃), erbium oxide (Er₂O₃), gadolinium oxide (Gd₂O₃), ytterbium oxide(Yb₂O₃), neodymium oxide (Nd₂O₃), praseodymium oxide (Pr₂O₃), ceriumoxide (CeO₂) and scandium oxide (Sc₂O₃), or a mixture of these oxides.More preferable oxides are Y₂O₃, Gd₂O₃ and Er₂O₃.

The amount of the stabilizer M₂O₃ (M is at least one kind of Y, Er, Gd,Yb, Nd, Pr, Ce and Sc) to be added is preferably within a range from 3to 15 mol %, and ZrO₂ or a ZrO₂—HfO₂ solid solution, which has excellentphase stability, can be obtained within the above range.

The composition of the thermal barrier coating layer comprising ZrO₂ ora ZrO₂—HfO₂ solid solution, which contains the stabilizer, and La₂O₃ isrepresented by “(Zr_(X)Hf_(1-X))O₂-3 to 15 mol % M₂O₃ (M is at least onekind of Y, Er, Gd, Yb, Ce, Nd, Pr and Sc)-0.05 to 10 mol % La₂O₃”, andis represented by the following general formula.

That is, the composition of the ceramics thermal barrier layer isrepresented by the general formula: (Zr_(α)Hf_(1-α))O₂-β mol % (M₂O₃)-γmol % (La₂O₃) (wherein M is an element constituting the stabilizer andis at least one element selected from Y, Er, Gd, Yb, Ce, Nd, Pr and Sc,and α, β and γ are coefficients) and the coefficients α, β and γ satisfythe relations: 0.05<α<1, 3≦β≦15, and 0.1≦γ≦10.

When the ceramics thermal barrier layer is formed by adjusting eachamount of stabilizer, ZrO₂, HfO₂ and La₂O₃ so as to satisfy the aboverespective relations, it is made possible to obtain a thermal barriercoating system which has low thermal conductivity and also has excellentsintering resistance and excellent phase stability.

The thermal barrier coating system of the present invention comprises ametal substrate, a metal bonding layer, and a ceramics thermal barrierlayer formed on the surface of the metal substrate via the metal bondinglayer, the ceramics thermal barrier layer comprising a plurality ofcolumnar grains, each extending vertically to the surface of the metalsubstrate. The columnar grain has an orientation in the direction of the(100) or (001) plane relative to the substrate. The columnar grain has astructure wherein fine laminar or bar-shaped protrusions, or combinedstructures (subgrains) are formed on the surface (feather-likestructures) and plural fine pores each having a size of 100 nm or lessare dispersed therein. In the ceramics thermal barrier layer, a volumefraction of pores included in the ceramics thermal barrier layer ispreferably from 10% to 50%. The volume fraction of pores is obtained bythe total volume of gaps between the columnar grains, fine gaps betweenprotrusions (subgrains) of the surface of the columnar grain, pores andthe like included in the columnar grain. When the porosity is less than10%, less effect of reducing the thermal conductivity of the ceramicsthermal barrier layer is exerted. On the other hand, the porosityexceeds 50%, the structural strength of the ceramics thermal barrierlayer decreases. Therefore, the porosity is preferably within a rangefrom 10 to 50%, and more preferably from 20 to 40%. The porosity can bemeasured by image analysis of an enlarged electron micrograph of asectional structure of the ceramics thermal barrier layer.

In the thermal barrier coating system, the metal bonding layer ispreferably made of an MCrAlY alloy (wherein that M is at least one kindof metal selected from Ni, Co, Fe, and an alloy thereof) or platinumaluminide.

In the thermal barrier coating system, the metal substrate, on which theceramics thermal barrier layer is formed via the metal bonding layer,comprises gas turbine parts. In the thermal barrier coating system, thegas turbine parts is preferably a turbine blade, a turbine nozzle vaneor combustion chamber parts. According to the present invention, thereis provided a thermal barrier coating system suited for use as gasturbine parts (gas turbine engine parts) such as turbine blade andcombustion chamber parts.

The method of manufacturing a thermal barrier coating system of thepresent invention is directed to a method of manufacturing a thermalbarrier coating system comprising a metal substrate, a metal bondinglayer, and a ceramics thermal barrier layer formed integrally on thesurface of the metal substrate via the metal bonding layer, whichcomprises forming the metal bonding layer on the surface of the metalsubstrate, simultaneously melting two kinds of raw materials consistingof a stabilized ZrO₂ deposition material and a La-based composite oxidedeposition material by an electron beam physical vapor deposition(EB-PVD) method, and depositing the resulting mixed vapor on the surfaceof the metal bonding layer to form the ceramics thermal barrier layer.

The method of manufacturing a thermal barrier coating system of thepresent invention is directed to a method of manufacturing a thermalbarrier coating system comprising a metal substrate, a metal bondinglayer, and a ceramics thermal barrier layer formed integrally on thesurface of the metal substrate via the metal bonding layer, whichcomprises forming the metal bonding layer on the surface of the metalsubstrate, simultaneously melting two kinds of raw materials such asstabilized ZrO₂—HfO₂ and a La-based composite oxide deposition materialby an electron beam physical vapor deposition (EB-PVD) method, anddepositing the resulting mixed vapor on the surface of the metal bondinglayer to form the ceramics thermal barrier layer.

In the respective methods described above, the La-based composite oxideis preferably any oxide containing La, and is more preferably La₂Zr₂O₇or La₂Hf₂O₇.

The method of manufacturing a thermal barrier coating system of thepresent invention is directed to a method of manufacturing a thermalbarrier coating system comprising a metal substrate, a metal bondinglayer, and a ceramics thermal barrier layer formed integrally on thesurface of the metal substrate via the metal bonding layer, whichcomprises forming the metal bonding layer on the surface of the metalsubstrate, melting a composite oxide deposition material, which isobtained by adding La₂O₃ to stabilized ZrO₂, by an electron beamphysical vapor deposition (EB-PVD) method, and depositing the resultingraw material vapor on the surface of the metal bonding layer to form theceramics thermal barrier layer.

The method of manufacturing a thermal barrier coating system of thepresent invention is directed to a method of manufacturing a thermalbarrier coating system comprising a metal substrate, a metal bondinglayer, and a ceramics thermal barrier layer formed integrally on thesurface of the metal substrate via the metal bonding layer, whichcomprises forming the metal bonding layer on the surface of the metalsubstrate, melting a composite oxide deposition material, which isobtained by adding La₂O₃ to stabilized ZrO₂—HfO₂, by an electron beamphysical vapor deposition (EB-PVD) method, and depositing the resultingraw material vapor on the surface of the metal bonding layer to form theceramics thermal barrier layer.

As described above, according to the low thermally conductive thermalbarrier coating system and the method of manufacturing the sameaccording to the present invention, since the ceramics thermal barrierlayer has a columnar structure of ZrO₂ or ZrO₂—HfO₂ containing astabilizer, and also contains a predetermined amount of La₂O₃, thethermal conductivity of the thermal barrier coating layer can beeffectively reduced, furthermore, sintering is suppressed and increasein thermal conductivity at high temperature can be suppressed.Therefore, oxidation can be suppressed by reducing the temperature ofthe metal substrate, thus making it possible to markedly enhance thermalbarrier properties and durability of the thermal barrier coating system.When the thermal barrier coating system of the present invention isapplied to high-temperature components such as gas turbine parts and jetengine parts, it is made possible to improve properties by extending thelifetimes of the high-temperature components and to markedly improvereliability and durability of the equipment using the high-temperaturecomponents.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a sectional view showing a configuration of an example of athermal barrier coating system comprising a ceramics thermal barrierlayer formed by an EB-PVD method of the present invention.

FIG. 2 is a sectional view showing a configuration of a thermal barriercoating system comprising a ceramics thermal barrier layer formed by aspraying method of the prior art.

FIG. 3 is a graph showing the results obtained by measuring thermalconductivity of a ceramics thermal barrier layer of thermal barriercoating systems of Example 1 and Comparative Example 1 after beingsubjected to a heat treatment at 1200° C. for 0 to 50 hours.

FIG. 4A is an electron micrograph showing a texture of a ceramicsthermal barrier layer of Comparative Example 1.

FIG. 4B is an electron micrograph showing a texture of a ceramicsthermal barrier layer of Example 1.

FIG. 5 is a graph showing a comparison in thickness of an oxide layerformed on a metal bonding layer made of a CoNiCrAlY alloy after a burnerrig test between thermal barrier coating systems of Example 1 andComparative Example 1.

FIG. 6 is a graph showing a comparison in thermal barrier properties ofa turbine blade between Example 10 and Comparative Example 5.

DESCRIPTION OF PREFERRED EMBODIMENTS

Embodiments of the present invention will be described in more detailwith reference to the accompanying drawings. The present invention isnot limited to the following embodiments and other modifications can bemade without departing from the scope of the present invention.

The thermal barrier coating system of the present invention has athree-layered structure shown in FIG. 1. First, a metal bonding layer 2as a second layer is formed so as to coat a metal substrate 1 as a firstlayer. The metal bonding layer 2 is made of an MCrAlY alloy (whereinthat M is an element of Ni, Co or Fe, or an alloy thereof) or platinumaluminide. On the surface of the metal bonding layer 2, a thermalbarrier coating layer (ceramics thermal barrier layer) 3 is formed andthe ceramics thermal barrier layer 3 is made of stabilized ZrO₂ orstabilized ZrO₂—HfO₂, and also contains 0.1 to 10 mol % of La₂O₃.

Although the metal substrate 1 is not specifically limited, Ni-basedsuperalloys such as Inconel 738, Co alloys, such as MarM509, and heatresisting alloys such as stainless steel, which are used as aconstituent material of gas turbine parts, can be widely applied for thepresent invention.

The metal bonding layer 2 firmly joins the metal substrate 1 to thethermal barrier coating layer 3, and also exhibits an action ofeliminating the influence of a difference in thermal expansioncoefficient between the metal substrate 1 and the thermal barriercoating layer 3, thereby reducing thermal stress generated between thetwo. The material constituting the metal bonding layer 2 is preferablyan MCrAlY alloy (wherein that M is at least one kind of metal of Ni, Coand Fe) or platinum aluminide in view of excellent corrosion resistance,excellent oxidation resistance and excellent heat resistance to themetal substrate 1 and thermal barrier coating layer 3.

The metal bonding layer 2 is made of the MCrAlY alloy, the above alloycomponents are deposited in the form of a film on the surface of themetal substrate 1 by a thermal spraying method such as low pressureplasma spraying method, or a physical vapor deposition (PVD) method. Inthe case in which the metal bonding layer is made of platinum aluminide,a metal bonding layer 2 made of platinum aluminide is formed on themetal substrate 1 by a diffusion treatment of Al after Pt plating.

The thickness of the metal bonding layer 2 is preferably within a rangefrom 50 to 200 μm. When the thickness of the metal bonding layer 2 isless than 50 μm, the effect of reducing thermal stress becomesinsufficient. On the other hand, when the thickness exceeds 200 μm, theeffect is saturated and the time required to form the metal bondinglayer in the form of a film increases. Therefore, the thickness of themetal bonding layer 2 is preferably set within a range from 50 to 200μm, and more preferably from 50 to 120 μm.

On the surface of the metal bonding layer 2, a thermal barrier coatinglayer 3 is formed. In proportion to the thickness of the thermal barriercoating layer, a thermal barrier effect increases. When the thickness istoo large, spalling is likely to occur. On the other hand, when thelayer is thin, less thermal barrier effect is exerted.

Therefore, the thickness is preferably set within a range from 50 to 800μm, and more preferably from 100 to 500 μm.

According to the low thermally conductive thermal barrier coating systemand the method of manufacturing the same, since the ceramics thermalbarrier layer has a columnar structure of ZrO₂ or a ZrO₂—HfO₂ solidsolution, which contains a stabilizer, and also contain a predeterminedamount of La₂O₃, the thermal conductivity of the thermal barrier coatinglayer can be effectively reduced and oxidation can be suppressed byreducing the temperature of the metal substrate, thus making it possibleto markedly enhance thermal barrier properties and durability of thethermal barrier coating system. Therefore, when the thermal barriercoating system of the present invention is applied to high-temperaturecomponents such as gas turbine parts and jet engine parts, it is madepossible to improve properties by extending the lifetimes of thehigh-temperature components and to markedly improve reliability anddurability of the equipment using the high-temperature components.

EXAMPLES Example 1

In Example 1, a thermal barrier coating system having a structure shownin FIG. 1 of Example 1 was manufactured by forming a metal bonding layer2 (thickness: 100 μm) made of a NiCoCrAlY alloy on the surface of aplate-shaped metal substrate 1 made of a superalloy (HS-188) by a lowpressure plasma spraying method, and forming a thermal barrier coatinglayer 3 (thickness: about 300 μm, porosity: about 25%) havingorientation in the (001) direction on the surface of the metal bondinglayer 2 by an electron beam physical vapor deposition method (EB-PVDmethod) using a ZrO₂-4 mol % (7 mass %)Y₂O₃ deposition materialcontaining 5 mol % of La₂O₃ as a raw material.

Example 2

In Example 2, a thermal barrier coating system of Example 2 wasmanufactured by forming a metal bonding layer 2 (thickness: 100 μm) madeof a NiCoCrAlY alloy on the surface of the same metal substrate 1 asthat used in Example 1 by a low pressure plasma spraying method, andforming a thermal barrier coating layer 3 (thickness: about 300 μm,porosity: about 25%) having orientation in the (001) direction on thesurface of the metal bonding layer 2 by an EB-PVD method using a(Zr_(0.75)Hf_(0.25))O₂-4 mol % (7 mass %)Y₂O₃ deposition materialcontaining 5 mol % of La₂O₃ as a raw material.

Example 3

In Example 3, a thermal barrier coating system of Example 3 wasmanufactured by forming a metal bonding layer 2 (thickness: 100 μm) madeof a NiCoCrAlY alloy on the surface of the same metal substrate 1 asthat used in Example 1 by a low pressure plasma spraying method, andforming a thermal barrier coating layer 3 (thickness: about 300 μm,porosity: about 25%) having orientation in the (001) direction on thesurface of the metal bonding layer 2 by an EB-PVD method using a(Zr_(0.5)Hf_(0.5))O₂-4 mol % (7 mass %)Y₂O₃ deposition materialcontaining 5 mol % of La₂O₃ as a raw material.

Example 4

In Example 4, a thermal barrier coating system of Example 4 wasmanufactured by forming a metal bonding layer 2 (thickness: 100 μm) madeof a NiCoCrAlY alloy on the surface of the same metal substrate 1 asthat used in Example 1 by a low pressure plasma spraying method, andforming a thermal barrier coating layer 3 (thickness: about 300 μm,porosity: about 25%) having orientation in the (001) direction on thesurface of the metal bonding layer 2 by an EB-PVD method using a(Zr_(0.25)Hf_(0.75))O₂-4 mol % (7 mass %)Y₂O₃ deposition materialcontaining 5 mol % of La₂O₃ as a raw material.

Example 5

In Example 5, a thermal barrier coating system having a structure shownin FIG. 1 of Example 1 was manufactured by forming a metal bonding layer2 (thickness: 100 μm) made of a NiCoCrAlY alloy on the surface of aplate-shaped metal substrate 1 made of a superalloy (HS-188) by a lowpressure plasma spraying method, and forming a thermal barrier coatinglayer 3 (thickness: about 300 μm, porosity: about 25%) havingorientation in the (001) direction on the surface of the metal bondinglayer 2 by an electron beam physical vapor deposition method (EB-PVDmethod) using a ZrO₂-4 mol % (7 mass %)Y₂O₃ deposition materialcontaining 2 mol % of La₂O₃ as a raw material.

Example 6

In Example 6, a thermal barrier coating system having a structure shownin FIG. 1 of Example 1 was manufactured by forming a metal bonding layer2 (thickness: 100 μm) made of a NiCoCrAlY alloy on the surface of aplate-shaped metal substrate 1 made of a superalloy (HS-188) by a lowpressure plasma spraying method, and forming a thermal barrier coatinglayer 3 (thickness: about 300 μm, porosity: about 25%) havingorientation in the (001) direction on the surface of the metal bondinglayer 2 by an electron beam physical vapor deposition method (EB-PVDmethod) using a ZrO₂-4 mol % (7 mass %)Y₂O₃ deposition materialcontaining 10 mol % of La₂O₃ as a raw material.

Example 7

In Example 7, a thermal barrier coating system of Example 7 wasmanufactured by forming a metal bonding layer 2 (thickness: 100 μm) madeof a NiCoCrAlY alloy on the surface of the same metal substrate 1 asthat used in Example 1 by a low pressure plasma spraying method, andforming a thermal barrier coating layer 3 (thickness: about 300 μm,porosity: about 25%) having orientation in the (001) direction on thesurface of the metal bonding layer 2 by an EB-PVD method using two kindsof deposition materials, which were a ZrO₂-4 mol % (7 mass %)Y₂O₃deposition material and a La₂Zr₂O₇ deposition material, as a rawmaterial.

Example 8

In Example 8, a thermal barrier coating system of Example 8 wasmanufactured by forming a metal bonding layer 2 (thickness: 100 μm) madeof a NiCoCrAlY alloy on the surface of the same metal substrate 1 asthat used in Example 1 by a low pressure plasma spraying method, andforming a thermal barrier coating layer 3 (thickness: about 300 μm,porosity: about 25%) having orientation in the (001) direction on thesurface of the metal bonding layer 2 by an EB-PVD method using a ZrO₂-4mol % (7 mass %)Er₂O₃ deposition material containing 5 mol % of La₂O₃ asa raw material.

Comparative Example 1

In Comparative Example 1, a thermal barrier coating system ofComparative Example 1 was manufactured by forming a metal bonding layer2 (thickness: 100 μm) made of a NiCoCrAlY alloy on the surface of thesame metal substrate 1 as that used in Example 1 by a low pressureplasma spraying method, and forming a thermal barrier coating layer 4(thickness: about 300 μm, porosity: about 25%) having orientation in the(001) direction on the surface of the metal bonding layer 2 by an EB-PVDmethod using a ZrO₂-4 mol % (7 mass %)Y₂O₃ deposition materialcontaining no La component as a raw material.

Comparative Example 2

In Comparative Example 2, a thermal barrier coating system ofComparative Example 2 was manufactured by forming a metal bonding layer2 (thickness: 100 μm) made of a NiCoCrAlY alloy on the surface of thesame metal substrate 1 as that used in Example 1 by a low pressureplasma spraying method, and forming a thermal barrier coating layer 4(thickness: about 300 μm, porosity: about 20%) on the surface of themetal bonding layer 2 by an atmospheric plasma spraying (APS) methodusing a ZrO₂-4 mol % (7 mass %)Y₂O₃ powder containing no La component asa raw material.

Comparative Example 3

In Comparative Example 3, a thermal barrier coating system having astructure shown in FIG. 2 of Comparative Example 3 was manufactured byforming a metal bonding layer 2 (thickness: 100 μm) made of a NiCoCrAlYalloy on the surface of a plate-shaped metal substrate 1 made of asuperalloy (HS-188) by a low pressure plasma spraying method, andforming a thermal barrier coating layer 4 (thickness: about 300 μm,porosity: about 25%) having orientation in the (001) direction on thesurface of the metal bonding layer 2 by an electron beam physical vapordeposition method (EB-PVD method) using a ZrO₂-4 mol % (7 mass %)Y₂O₃deposition material containing 15 mol % of La₂O₃ as a raw material.

Comparative Example 4

In Comparative Example 4, a thermal barrier coating system having astructure shown in FIG. 2 of Comparative Example 4 was manufactured byforming a metal bonding layer 2 (thickness: 100 μm) made of a NiCoCrAlYalloy on the surface of a plate-shaped metal substrate 1 made of asuperalloy (HS-188) by a low pressure plasma spraying method, andforming a thermal barrier coating layer 4 (thickness: about 300 μm,porosity: about 25%) having orientation in the (001) direction on thesurface of the metal bonding layer 2 by an electron beam physical vapordeposition method (EB-PVD method) using a ZrO₂-1.5 mol % (2.7 mass%)Y₂O₃ deposition material containing 5 mol % of La₂O₃ as a rawmaterial.

Evaluation Tests

By subjecting samples of the resulting thermal barrier coating systemsof the respective Examples and Comparative Examples to a burner rigtest, thermal shock properties of the respective thermal barrier coatingsystems were evaluated. In the burner rig test, a heating-cooling cyclecomprising an operation of heating the side of a thermal barrier coatinglayer so that the surface temperature becomes 1300° C. while cooling thebottom of a metal substrate of a thermal barrier coating system, as ahigh-temperature component, for one hour and an operation of cooling for10 minutes was repeated, and then thermal cycle lifetime was determinedby measuring the number of cycles until spalling of the thermal barriercoating layer and durability and reliability of the respective thermalbarrier coating systems were evaluated. The results of the burner rigtest are shown in Table 1. TABLE 1 Amount Thermal Ratio of La₂O₃Formation cycle Hf/Zr Stabilizer added method life Example 1 — Y₂O₃ 5mol % EB-PVD >490 (4 mol %) (1 deposition material) Example 2 0.25 Y₂O₃5 mol % EB-PVD >500 (4 mol %) (1 deposition material) Example 3 0.5 Y₂O₃5 mol % EB-PVD 410 (4 mol %) (1 deposition material) Example 4 0.75 Y₂O₃5 mol % EB-PVD 350 (4 mol %) (1 deposition material) Example 5 — Y₂O₃ 2mol % EB-PVD 451 (4 mol %) (1 deposition material) Example 6 — Y₂O₃ 10mol %  EB-PVD 340 (4 mol %) (1 deposition material) Example 7 — Y₂O₃ 5mol % EB-PVD >500 (4 mol %) (2 deposition materials) Example 8 — Er₂O₃ 5mol % EB-PVD >500 (4 mol %) (1 deposition material) Comparative — Y₂O₃ —EB-PVD 210 Example 1 (4 mol %) (1 deposition material) Comparative —Y₂O₃ — APS 51 Example 2 (4 mol %) Comparative — Y₂O₃ 15 mol %  EB-PVD181 Example 3 (4 mol %) (1 deposition material) Comparative — Y₂O₃ 5 mol% EB-PVD 30 Example 4 (1.5 mol %) (1 deposition material)

As is apparent from the results shown in Table 1, thermal cycle life wasmarkedly improved in the case of the thermal barrier coating systemsprovided with a ceramics thermal barrier layer containing apredetermined amount of La₂O₃ of the respective Examples. On the otherhand, thermal cycle life is reduced in the case of the thermal barriercoating systems provided with a ceramics thermal barrier layer 4, whichdoes not contain La₂O₃ and is made only of stabilized zirconia, ofComparative Examples 1 and 2.

As is apparent from the results obtained by comparing Examples 2, 3 and4, a ratio Zr/Hf is preferably set to 0.5 or less. As is apparent fromthe results obtained by comparing Example 1, 5 and 6 with ComparativeExample 3, the amount of La₂O₃ to be added is preferably 10 mol % orless. Furthermore, the result of Comparative Example 4 shows that whenthe amount of Y₂O₂ as a stabilizer is 3 mol % or less, the stability ofthe obtained phase becomes poor and many monoclinic crystals are formedand thermal cycle life is decreased.

FIG. 3 is a graph showing the results obtained by measuring a thermalconductivity of thermal barrier coating systems of Example 1 andComparative Example 1 after being subjected to a heat treatment at atemperature of 1200° C. for 0 to 50 hours. As is apparent from theresults shown in FIG. 3, initial thermal conductivity can be markedlyreduced by adding La₂O₃ and also an increase in thermal conductivity canbe effectively suppressed even when subjected to a heat treatment for along time. It is considered that an increase in thermal conductivity athigh temperature is caused by densification as a result of sintering ofthe ceramics thermal barrier layer. Since La₂O₃ also has an effect ofsuppressing sintering, an increase in thermal conductivity at hightemperature can be suppressed and low thermal conductivity of the filmcan be maintained. Furthermore, the heat and sintering resistance can beimproved by substituting a portion of ZrO₂ with HfO₂ and thus anincrease in thermal conductivity can be suppressed.

FIGS. 4A and 4B are electron micrographs showing a comparison in textureof a ceramics thermal barrier layer of a thermal barrier coating systembetween Example 1 and Comparative Example 1. In Example 1, it isapparent that a large amount of a feather-like structure is introducedinto a columnar grain of a thermal barrier layer by the addition ofLa₂O₃. It is believed that reduction in thermal conductivity is mainlycaused by introduction of defects such as feather-like structures andnanopores. The other possible reason for the reduction in thermalconductivity is the introduction of vacancies and strain fields by La₂O₃addition. La₂O₃ was dissolved in the matrix and created oxygen vacanciesto maintain the electrical neutrality of the lattice. La ions alsointroduced strain fields as well as vacancies into the lattice, both ofwhich would lower thermal conductivity by reducing the phonon mean freepath. However, such contribution to the reduction of thermalconductivity was revealed to be as much as 30%. The feather-likestructure was introduced because diffusion and sintering duringdeposition were suppressed by the addition of La₂O₃. On the other hand,it is apparent from the texture that the feather-like structure growsinsufficiently and less effect of reducing the thermal conductivity isexerted because La₂O₃ is not added in Comparative Example 1. Thermalconductivity of the material of Example 1 of FIG. 4B is 0.5 W/mK, andthermal conductivity of the material of Comparative Example 1 of FIG. 4Ais 1.4 W/mK.

FIG. 5 is a graph showing a comparison in thickness of an oxide layerformed on a metal bonding layer made of a CoNiCrAlY alloy after a burnerrig test between thermal barrier coating systems of Examples 1 and 2 andComparative Example 1. It has been confirmed that the oxide layer has asmall thickness in Examples 1 and 2 and oxidation caused less damage.This is because the ceramics thermal barrier layer has low thermalconductivity in Example 1 and thus the surface temperature of the metalbonding layer made of a CoNiCrAlY alloy could be reduced as comparedwith Comparative Example 1. According to these Examples, the surfacetemperature of the substrate can be reduced by imparting low thermalconductivity to the ceramics thermal barrier layer, thus making itpossible to markedly extend the lifetime up to spalling.

Example 9

In Example 9, a turbine blade provided with a thermal barrier coating(thermal barrier coating system) was manufactured by forming a metalbonding layer 2 made of PtAl on the surface of a turbine blade for gasturbine engine (metal substrate 1), and forming a thermal barriercoating layer 3 (porosity: about 25%) having orientation in the (001)direction on the surface of the metal bonding layer 2 by an electronbeam physical vapor deposition method (EB-PVD method) using a ZrO₂-4 mol% (7 mass %)Y₂O₃ deposition material containing 5 mol % of La₂O₃ as araw material.

Comparative Example 5

In Comparative Example 5, a turbine blade provided with a thermalbarrier coating (thermal barrier coating system) of Comparative Example5 was manufactured by forming a metal bonding layer 2 made of PtAl onthe surface of the same turbine blade (metal substrate 1) as that usedin Example 9, and forming a thermal barrier coating layer 4 (porosity:about 25%) having orientation in the (001) direction on the surface ofthe same metal bonding layer 2 by an EB-PVD method using a ZrO₂-4 mol %(7 mass %)Y₂O₃ deposition material containing no La component as a rawmaterial.

FIG. 6 shows the results (plots in the graph) obtained by measuring thesurface temperature of a metal bonding layer 2 while feeding a coolingair inside the turbine blades manufactured in Example 9 and ComparativeExample 5 it a high-temperature gas at 1050° C. When the turbine bladeis provided with the thermal barrier coating layer, the size of acooling hole of the blade decreases as a result of the deposition of thecoating, and thus amount of the cooling air decreases. In FIG. 6, thecurves show the temperature changs at metal layer 2 estimated from theeffect of amount of cooling air decrease (X-axis). As is apparent fromthe same graph, in the case of Comparative Example 5, the cooling airamount decreases, and the metal temperature exceeds a target temperatureto, and thus the cooling holes must be retrimmed after coating. Incontrast, in the turbine blade of Example 9, the temperature of themetal portion was sufficiently lower than the target temperature evenafter coating. From this result, in the case in which the thermalbarrier coating layer of the present invention is formed, it is madepossible to achieve a sufficiently low temperature on the metal surfacewithout performing complex processes such as retrimming of coolingholes.

1. A method of manufacturing a thermal barrier coating system comprisinga metal substrate, a metal bonding layer, and a ceramics thermal barrierlayer formed integrally on the surface of the metal substrate via themetal bonding layer, which comprises forming the metal bonding layer onthe surface of the metal substrate, simultaneously melting two kinds ofraw materials which are stabilized ZrO₂ deposition material and aLa-based composite oxide deposition material by an electron beamphysical vapor deposition method.
 2. A method of manufacturing a thermalbarrier coating system comprising a metal substrate, a metal bondinglayer, and a ceramics thermal barrier layer formed integrally on thesurface of the metal substrate via the metal bonding layer, whichcomprises forming the metal bonding layer on the surface of the metalsubstrate, simultaneously melting two kinds of raw materials which are astabilized ZrO₂—HfO₂ and a La-based composite oxide deposition materialby an electron beam physical vapor deposition method, and depositing theresulting mixed vapor on the surface of the metal bonding layer to formthe ceramics thermal barrier layer.
 3. A method of manufacturing athermal barrier coating system comprising a metal substrate, a metalbonding layer, and a ceramics thermal barrier layer formed integrally onthe surface of the metal substrate via the metal bonding layer, whichcomprises forming the metal bonding layer on the surface of the metalsubstrate, melting a composite oxide deposition material, which isobtained by adding La₂O₃ to a stabilized ZrO₂, by an electron beamphysical vapor deposition method, and depositing the resulting rawmaterial vapor on the surface of the metal bonding layer to form theceramics thermal barrier layer.
 4. A method of manufacturing a thermalbarrier coating system comprising a metal substrate, a metal bondinglayer, and a ceramics thermal barrier layer formed integrally on thesurface of the metal substrate via the metal bonding layer, whichcomprises forming the metal bonding layer on the surface of the metalsubstrate, melting a composite oxide deposition material, which isobtained by adding La₂O₃ to a stabilized ZrO₂—HfO₂, by an electron beamphysical vapor deposition method, and depositing the resulting rawmaterial vapor on the surface of the metal bonding layer to form theceramics thermal barrier layer.